Measurement of Ti atom densities against discharge parameters in Ti-O2 magnetron sputtering

被引：0
|
作者：
Nakamura, T. [1 ]
Okimura, K. [1 ]
机构：
[1] Department of Electronics, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1292, Japan
来源：
Shinku/Journal of the Vacuum Society of Japan | 2001年 / 44卷 / 03期
关键词：
D O I：
10.3131/jvsj.44.314
中图分类号：
学科分类号：
摘要：
5
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页码：314 / 317
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