Influence of substrate temperature on the TiC thin films prepared by unbalanced magnetron sputtering method

被引：0
|
作者：
Park, Yong-Seob [1 ]
Lee, Jae-Hyeong [2 ]
机构：
[1] School of Electronic and Electrical Engineering, Sungkyunkwan University, Korea, Republic of
[2] Dept. of Photoelectronics Information, Chosun College of Science and Technology, Korea, Republic of
来源：
Transactions of the Korean Institute of Electrical Engineers | 2013年 / 62卷 / 02期
关键词：
7;
D O I：
10.5370/KIEE.2013.62.2.284
中图分类号：
学科分类号：
摘要：
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页码：284 / 287
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