Influence of substrate temperature on the TiC thin films prepared by unbalanced magnetron sputtering method

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作者
Park, Yong-Seob [1 ]
Lee, Jae-Hyeong [2 ]
机构
[1] School of Electronic and Electrical Engineering, Sungkyunkwan University, Korea, Republic of
[2] Dept. of Photoelectronics Information, Chosun College of Science and Technology, Korea, Republic of
关键词
7;
D O I
10.5370/KIEE.2013.62.2.284
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页码:284 / 287
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