Electron-beam deposition of a thin-film magneto-dielectric iron and alumina based coating by a fore-vacuum plasma electron source

被引：0
|
作者：
Zolotukhin D.B. [1 ]
Tyunkov A.V. [1 ]
Frolova V.P. [1 ,2 ]
Yushkov Yu.G. [1 ,2 ]
机构：
[1] Tomsk State University of Control Systems and Radioelectronics, 40 Lenin Ave., Tomsk
[2] Institute of High Current Electronics SB RAS, 2/3 Academichesky Ave., Tomsk
来源：
Applied Physics | 2023年 / 01期
关键词：
beam plasma; fore-vacuum plasma electron sources; magneto-dielectric coatings;
D O I：
10.51368/1996-0948-2023-1-61-65
中图分类号：
学科分类号：
摘要：
The results of an experiment on a thin-film magneto-dielectric coating deposition under successive electron-beam radiation in helium and oxygen at a fore-vacuum pressure (5 Pa) of samples made of steel and alumina ceramics are described. The presence of a coating of magnetic properties was demonstrated by the method of ferromagnetic resonance, the X-ray study confirmed the presence of a coating of Fe3O4 magnetic oxide, and the coatings measured by an optical profilometer were 3–6 μm. © 2023 Federal Informational-Analytical Center of the Defense Industry. All rights reserved.
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页码：61 / 65
页数：4
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