SiC thin films in fabrication of MEMS devices

被引：0
|
作者：
Wang, Yu [1 ]
Guo, Hui [1 ]
Zhang, Haixia [1 ]
Tian, Dayu [1 ]
Zhang, Guobing [1 ]
Li, Zhihong [1 ]
机构：
[1] Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronic, Peking University, Beijing 100871, China
来源：
Zhongguo Jixie Gongcheng/China Mechanical Engineering | 2005年 / 16卷 / 14期
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页码：1310 / 1312
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