SiC thin films in fabrication of MEMS devices

被引：0
|
作者：
Wang, Yu [1 ]
Guo, Hui [1 ]
Zhang, Haixia [1 ]
Tian, Dayu [1 ]
Zhang, Guobing [1 ]
Li, Zhihong [1 ]
机构：
[1] Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronic, Peking University, Beijing 100871, China
来源：
Zhongguo Jixie Gongcheng/China Mechanical Engineering | 2005年 / 16卷 / 14期
关键词：
5;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1310 / 1312
相关论文
共 50 条
  • [21] CMOS MEMS Fabrication Technologies and Devices
    Qu, Hongwei
    MICROMACHINES, 2016, 7 (01)
  • [22] Very thin poly-SiC films for micro/nano devices
    Fu, Xiao-An
    Noh, Sangsoo
    Chen, Li
    Mehregany, Mehran
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2008, 8 (06) : 3063 - 3067
  • [23] APPLICATIONS OF SIC THIN-FILMS IN LOW-TEMPERATURE DEVICES
    BORISENKO, IY
    ZAKOSARENKO, VM
    ILYICHOV, EV
    TULIN, VA
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 11 (1-4): : 117 - 119
  • [24] IR laser welding of thin polymer films as a fabrication method for polymer MEMS
    Beck, WA
    Huang, M
    Ketterl, J
    Hughes, T
    SARATOV FALL MEETING 2002: LASER PHYSICS AND PHOTONICS, SPECTROSCOPY, AND MOLECULAR MODELING III; COHERENT OPTICS OF ORDERED AND RANDOM MEDIA III, 2003, 5067 : 167 - 178
  • [25] Fabrication of MEMS based structures for characterization of thin metal films by nanoindentation technique
    Saghaeian, F.
    Keckes, J.
    Zechner, J.
    Woehlert, S.
    Schreiber, K. A.
    Pfaff, H.
    Walter, J.
    2018 20TH INTERNATIONAL CONFERENCE ON ELECTRONIC MATERIALS AND PACKAGING (EMAP), 2018,
  • [26] Fabrication of piezoelectric MEMS devices-from thin film to bulk PZT wafer
    Zhihong Wang
    Jianmin Miao
    Chee Wee Tan
    Ting Xu
    Journal of Electroceramics, 2010, 24 : 25 - 32
  • [27] Fabrication of piezoelectric MEMS devices-from thin film to bulk PZT wafer
    Wang, Zhihong
    Miao, Jianmin
    Tan, Chee Wee
    Xu, Ting
    JOURNAL OF ELECTROCERAMICS, 2010, 24 (01) : 25 - 32
  • [28] Mechanical properties of ultrananocrystalline diamond thin films relevant to MEMS/NEMS devices
    Espinosa, HD
    Prorok, BC
    Peng, B
    Kim, KH
    Moldovan, N
    Auciello, O
    Carlisle, JA
    Gruen, DM
    Mancini, DC
    EXPERIMENTAL MECHANICS, 2003, 43 (03) : 256 - 268
  • [29] Temperature-Dependent Viscoelasticity in Thin Au Films and Consequences for MEMS Devices
    McLean, Mark
    Brown, Walter L.
    Vinci, Richard P.
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2010, 19 (06) : 1299 - 1308
  • [30] Characterization of mechanical properties of silicon nitride thin films for MEMS devices by nanoindentation
    Huang, H
    Hu, XZ
    Liu, Y
    Bush, M
    Winchester, K
    Musca, C
    Dell, J
    Faraone, L
    JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2005, 21 : 13 - 16
12345