Thin film bulk acoustic resonator (FBAR) technology and its applications

被引：0
|
作者：
He, Jie [1 ]
Liu, Rong-Gui [1 ]
Ma, Jin-Yi [1 ]
机构：
[1] Sichuan Institute of Piezoelectric and Acousto-optic Technology, Chongqing 400060, China
来源：
Yadian Yu Shengguang/Piezoelectrics and Acoustooptics | 2007年 / 29卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The thin film bulk acoustic wave devices have the features of small size, low cost, high Q-value, high power handling capability and application of high frequencies and compatibility with IC-technology. They can be used advantageously in RF system operating between land 10 GHz. They are expected to replace traditional SAW devices and microwave ceramic devices in the future wireless communication system. This paper presents an overview of the principle of FBAR technology and its new development and applications. Three device structures and their fabrications were analyzed. A brief discussion of the future trends and challenges of FBAR technology is also described.
引用
收藏
页码：379 / 382
相关论文
共 50 条
  • [21] Sensitivity of thin-film bulk acoustic resonators (FBAR) to localized mechanical forces
    Campanella, H.
    Camargo, C. J.
    Esteve, J.
    Tsai, J. M.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2013, 23 (06)
  • [22] Mass Sensor Based on Thin Film Bulk Acoustic Resonator
    Wu, Biyan
    PROCEEDINGS OF THE 2009 2ND INTERNATIONAL CONFERENCE ON BIOMEDICAL ENGINEERING AND INFORMATICS, VOLS 1-4, 2009, : 1018 - 1021
  • [23] Simulation and fabrication of thin film bulk acoustic wave resonator
    Han Xixi
    Ou Yi
    Li Zhigang
    Ou Wen
    Chen Dapeng
    Ye Tianchun
    JOURNAL OF SEMICONDUCTORS, 2016, 37 (07)
  • [24] Simulation and fabrication of thin film bulk acoustic wave resonator
    韩茜茜
    欧毅
    李志刚
    欧文
    陈大鹏
    叶甜春
    Journal of Semiconductors, 2016, 37 (07) : 90 - 95
  • [25] Investigation of Liquid Sensor Using a Dual-Mode Thin Film Bulk Acoustic Resonator (FBAR) Combined with Au/Cr Layers
    Chang, Wei-Tsai
    Chen, Ying-Chung
    Lin, Re-Ching
    Kao, Kuo-Sheng
    Jiang, Jia-Ming
    Yang, Chun-Hung
    Cheng, Chien-Chuan
    ADVANCED MANUFACTURING SYSTEMS, PTS 1-3, 2011, 201-203 : 700 - +
  • [26] Polymer Coated Film Bulk Acoustic Resonator (FBAR) Arrays for Indoor Air Quality (IAQ) Monitoring
    Lee, Si Hoon
    Jung, Yongmi
    Kim, Taepyeong
    Kim, Taegyu
    Kim, Younghwan
    Jung, Suntae
    2015 IEEE SENSORS, 2015, : 1291 - 1294
  • [27] Enabling the 5G: Modelling and Design of High Q Film Bulk Acoustic Wave Resonator (FBAR) For High Frequency Applications
    Ashraf, Nourhan
    Mesbah, Yasmin
    Emad, Aya
    Mostafa, Hassan
    2020 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS (ISCAS), 2020,
  • [28] Processing Chip for Thin Film Bulk Acoustic Resonator Mass Sensor
    Jin, Pengcheng
    Dong, Shurong
    Jin, Hao
    Wu, Mengjun
    JOURNAL OF CONTROL SCIENCE AND ENGINEERING, 2012, 2012
  • [29] A scandium doped aluminum nitride thin film bulk acoustic resonator
    Gao, Chao
    Wang, Yaxin
    Cai, Yao
    Lin, Binghui
    Zou, Yang
    Xu, Qinwen
    Yang, Tingting
    Liu, Wenjuan
    Liu, Yan
    Guo, Shishang
    Sun, Chengliang
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2024, 34 (08)
  • [30] Effect of design parameters on thin film bulk acoustic resonator performance
    N. K. Choi
    K. B. Kim
    Y. I. Kim
    M. S. Kim
    Journal of Electroceramics, 2014, 33 : 17 - 24
12345