Narrow trench corrosion of copper damascene interconnects

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作者：
Ernur, Didem [1 ,2 ]
Kondo, Seiichi [3 ]
Maex, Karen [1 ,2 ]
机构：
[1] [1,Ernur, Didem
[2] Kondo, Seiichi
[3] 1,Maex, Karen
来源：
Ernur, D. (ernurd@imec.be) | 1600年 / Japan Society of Applied Physics卷 / 41期
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页码：7338 / 7344
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