The effect of cerium precursor agglomeration on the synthesis of ceria particles and its influence on shallow trench isolation chemical mechanical polishing performance

被引：0
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作者：
Kim, Dae-Hyeong [1 ]
Kim, Sang-Kyun [2 ]
Kang, Hyun-Goo [3 ]
Park, Jea-Gun [3 ]
Paik, Ungyu [2 ]
机构：
[1] KCTech., 271-14, Kyeruk-Ri, Miyang-Myon, Anseong-Si, Kyongki-Do, Korea, Republic of
[2] Department of Ceramic Engineering, Hanyang University, Seoul 133-791, Korea, Republic of
[3] Nano-SOI Process Laboratory, Hanyang University, Seoul 133-791, Korea, Republic of
来源：
Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 12卷 / 8422-8426期
关键词：
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摘要：
Agglomeration - Calcination - Chemical mechanical polishing - Crystalline materials - Slurries - Synthesis (chemical)
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