Velocity of subsonic and hypersonic surface acoustic waves on silicon with native oxide layer

The anisotropic dependence of the velocity of surface acoustic waves (SAW) on silicon is explored using surface Brillouin light scattering. Measurements of the SAW velocity are compared to a numerical model that takes into account the native thin amorphous oxide layer formed at the top surface of the silicon wafer. The model accounts for material loss and provides a relative estimate for the backscattered intensity resulting from the ripple effect. For the (100) sample considered, a thickness of 4 nm fits well with experimental data, considering material constants of amorphous silica for the oxide. A global phase velocity decrease of -11 m/s per nanometer of silica thickness is predicted for surface phonons at frequencies around 16 GHz.