Challenges of high-yield manufacture in micro-light-emitting diodes displays: chip fabrication, mass transfer, and detection

被引:3
|
作者
Yu, Binhai [1 ]
Li, Yong [1 ]
Li, Jiasheng [1 ]
Ding, Xinrui [1 ]
Li, Zongtao [1 ,2 ]
机构
[1] South China Univ Technol, Natl & Local Joint Engn Res Ctr Semicond Display &, Sch Mech & Automot Engn, Guangzhou 510641, Peoples R China
[2] Foshan Nationstar Optoelect Co Ltd, Guangdong Prov Key Lab Semicond Micro Display, Foshan 528000, Peoples R China
基金
中国国家自然科学基金;
关键词
micro-LED; yield; defect; mass transfer; detection; LASER LIFT-OFF; QUANTUM-WELL; LED DISPLAY; PRINTED ASSEMBLIES; HIGH-EFFICIENCY; GAN; GROWTH; GAAS; INTEGRATION; DEPENDENCE;
D O I
10.1088/1361-6463/ad6ce3
中图分类号
O59 [应用物理学];
学科分类号
摘要
Micro-light-emitting diode (micro-LED) is a promising display technology that offers significant advantages, including superior brightness, resolution, contrast, energy consumption, and response speed. It is widely recognized as the next generation of display technology with broad application prospects. However, in the manufacturing process of micro-LED displays, producing high-quality and defect-free micro-LED chips and achieving non-destructive processing throughout the long manufacturing chain pose significant difficulties, causing the low production yield of micro-LED displays and extremely limiting their commercialization. This paper provides an overview of high-yield manufacture of micro-LED displays, targeted to improve the production yield during three key manufacturing processes: chip fabrication, mass transfer, and detection. The factors causing chip defects and key technologies for reducing chip defects in these three manufacturing processes, which are closely related to the production yield of micro-LED displays manufacturing, are discussed. Lastly, the future prospects of micro-LED display technology are highlighted.
引用
收藏
页数:22
相关论文
共 36 条
  • [11] Demonstration of high efficiency cascaded blue and green micro-light-emitting diodes with independent junction control
    Li, Panpan
    Li, Hongjian
    Yao, Yifan
    Zhang, Haojun
    Lynsky, Cheyenne
    Qwah, Kai Shek
    Speck, James S.
    Nakamura, Shuji
    DenBaars, Steven P.
    APPLIED PHYSICS LETTERS, 2021, 118 (26)
  • [12] High-power AlGaN deep-ultraviolet micro-light-emitting diode displays for maskless photolithography
    Feng, Feng
    Liu, Yibo
    Zhang, Ke
    Yang, Hang
    Hyun, Byung-Ryool
    Xu, Ke
    Kwok, Hoi-Sing
    Liu, Zhaojun
    NATURE PHOTONICS, 2025, 19 (01) : 101 - 108
  • [13] High-Yield Exfoliation of Stanene Nanodots for High-Performance Organic Light-Emitting Diodes
    Wang, Jingkun
    Miao, Yanqin
    Lu, Ze
    Zhang, Qi
    Guo, Wenhao
    Zhao, Min
    Zhai, Xinping
    Du, Huayun
    ACS APPLIED MATERIALS & INTERFACES, 2024, 16 (35) : 46590 - 46599
  • [14] Quantum Dot Color Conversion Efficiency Enhancement in Micro-Light-Emitting Diodes by Non-Radiative Energy Transfer
    Du, Zaifa
    Li, Dianlun
    Guo, Weiling
    Xiong, Fangzhu
    Tang, Penghao
    Zhou, Xiongtu
    Zhang, Yongai
    Guo, Tailiang
    Yan, Qun
    Sun, Jie
    IEEE ELECTRON DEVICE LETTERS, 2021, 42 (08) : 1184 - 1187
  • [15] A Buried High k Insulator for Suppressing the Surface Recombination for GaN-Based Micro-Light-Emitting Diodes
    Zhang, Muyao
    Hang, Sheng
    Chu, Chunshuang
    Shao, Hua
    Zhang, Yidan
    Zhang, Yonghui
    Zhang, Yandi
    Zheng, Quan
    Li, Qing
    Zhang, Zi-Hui
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2022, 69 (06) : 3213 - 3216
  • [16] Wafer-Scale Monolithic Integration of Blue Micro-Light-Emitting Diodes and Green/Red Quantum Dots for Full-Color Displays
    Xu, Feifan
    Tao, Tao
    Zhang, Dongqi
    Zhang, Yang
    Sang, Yimeng
    Yu, Junchi
    Zhi, Ting
    Zhuang, Zhe
    Xie, Zili
    Zhang, Rong
    Liu, Bin
    IEEE ELECTRON DEVICE LETTERS, 2023, 44 (08) : 1320 - 1323
  • [17] Improving Optical Efficiency and Luminance of GaN-Based Micro-Light-Emitting Diodes for High-Resolution Displays via NH3 Plasma Pretreatment
    Liu, Zhaoyong
    Ren, Kailin
    Liu, Yibo
    Feng, Feng
    Li, Zichun
    Zeng, Jingnan
    Yin, Luqiao
    Kwok, Hoi-Sing
    Liu, Zhaojun
    Zhang, Jianhua
    ACS APPLIED MATERIALS & INTERFACES, 2024, 17 (01) : 1420 - 1427
  • [18] Effects of Current, Temperature, and Chip Size on the Performance of AlGaInP-Based Red Micro-Light-Emitting Diodes with Different Contact Schemes
    Lee, Da-Hoon
    Lee, Sang-Youl
    Shim, Jong-In
    Seong, Tae-Yeon
    Amano, Hiroshi
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2021, 10 (09)
  • [19] High efficiency of III-nitride micro-light-emitting diodes by sidewall passivation using atomic layer deposition
    Wong, Matthew S.
    Hwang, David
    Alhassan, Abdullah I.
    Lee, Changmin
    Ley, Ryan
    Nakamura, Shuji
    Denbaars, Steven P.
    OPTICS EXPRESS, 2018, 26 (16): : 21324 - 21331
  • [20] High-temperature performance of InGaN-based amber micro-light-emitting diodes using an epitaxial tunnel junction contact
    Sang, Yimeng
    Zhuang, Zhe
    Xing, Kun
    Zhang, Dongqi
    Yan, Jinjian
    Jiang, Zhuoying
    Li, Chenxue
    Chen, Kai
    Ding, Yu
    Tao, Tao
    Iida, Daisuke
    Wang, Ke
    Li, Cheng
    Huang, Kai
    Ohkawa, Kazuhiro
    Zhang, Rong
    Liu, Bin
    APPLIED PHYSICS LETTERS, 2024, 124 (14)