[1] Changsha Univ Sci & Technol, Changsha 410114, Peoples R China
[2] Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China
[3] Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
[4] Chinese Acad Sci, Xiongan Inst Innovat, Lab Photon Integrated Circuits, Shijiazhuang 071700, Hebei, Peoples R China