Secondary electron emission reduction from boron nitride composite ceramic surfaces by the artificial microstructures and functional coating

被引:2
|
作者
Lian, Zhuoxi [1 ]
Xu, Yanan [2 ]
Meng, Xiangchen [1 ]
Wang, Dan [1 ,3 ]
Chen, Jixin [4 ]
Qi, Kangcheng [5 ]
He, Yongning [1 ,3 ]
机构
[1] Xi An Jiao Tong Univ, Sch Microelect, Xian 710049, Peoples R China
[2] Shanghai Inst Space Prop, Shanghai Engn Res Ctr Space Engine, Shanghai 201112, Peoples R China
[3] Key Lab Micronano Elect & Syst Integrat Xian City, Xian 710049, Peoples R China
[4] Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
[5] Univ Elect Sci & Technol China, Sch Optoelect Sci & Engn, Chengdu 610000, Peoples R China
关键词
boron nitride; secondary electron emission; laser etching; titanium nitride; STATIONARY PLASMA THRUSTERS; HALL-EFFECT THRUSTER; YIELD; WALL;
D O I
10.1088/1361-6463/ad471c
中图分类号
O59 [应用物理学];
学科分类号
摘要
Boron nitride-silicon dioxide (BN-SiO2) composite ceramic is a typical Hall thruster wall material, and its secondary electron emission (SEE) property dominates the sheath characteristics inside the thrusters. Lowering the SEE yield (SEY) of the wall surface can remarkably improve the sheath stability of Hall thrusters. To accomplish the SEY reduction for BN-SiO2, artificial surface microstructure and surface coating technologies are employed. The morphology analysis demonstrated the shape and feature sizes of the microstructure could be largely controlled by adjusting the laser etching parameters. Then we realized an increasingly significant SEY reduction for BN-SiO2 as the average aspect ratio of the microhole increases. The microstructures showed a remarkable SEY reduction when the laser power was 10 W and the scanning cycle was 50. In this case, the SEY peak values (delta m) of the two BN-SiO2 samples with mass ratios of 7:3 and 6:4 decrease from 2.62 and 2.38 to 1.55 and 1.46 respectively. For a further SEY reduction, a sputtering process was employed to deposit TiN film on the microstructures. The results showed that the TiN coating of 246 nm thickness reduced the delta m values of the two samples from 1.55 and 1.46 to 0.82 and 0.76, which achieved a notable SEY reduction compared to the original surface. Via simulation work, the SEY reduction achieved by microstructures was theoretically interpreted. Besides, by considering the effect of surface charging, the results of SEY converged to 1 with the irradiation pulse increasing presented. The research demonstrated a remarkable SEY reduction for BN-SiO2 ceramic by constructing surface microstructure and depositing TiN coating, which has application sense for low SEY engineering in specific working scenarios.
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页数:14
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