A Lamb Wave Resonator With Trapezoidal Interdigitated Electrodes

被引：1
|
作者：
Chen, Xiang [1 ]
Qu, Yuanhang [1 ]
Luo, Tiancheng [2 ]
Gu, Xiyu [3 ]
Huang, Xiaoming [3 ]
Cai, Yao [1 ]
Guo, Shishang [3 ]
Liu, Yan [4 ]
Sun, Chengliang [1 ]
机构：
[1] Wuhan Univ, Inst Technol Sci, Wuhan, Peoples R China
[2] Agcy Sci Technol & Res, Inst Mat Res & Engn, Singapore, Singapore
[3] Wuhan Univ, Sch Phys & Technol, Wuhan, Peoples R China
[4] Hubei Yangtze Memory Labs, Wuhan, Peoples R China
来源：
2024 IEEE MTT-S INTERNATIONAL CONFERENCE ON MICROWAVE ACOUSTICS & MECHANICS, IC-MAM | 2024年
基金：
中国博士后科学基金; 中国国家自然科学基金;
关键词：
Lamb wave resonator; aluminum nitride; spurious mode;
D O I：
10.1109/IC-MAM60575.2024.10538492
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Due to its multimodal characteristics, filters composed of aluminum nitride-based Lamb wave resonators are easily susceptible to interference from spurious modes. This paper constructed trapezoidal interdigitated electrodes based on modal vibration patterns and dispersion characteristics, and verified their suppression effect on spurious modes through simulation software (COMSOL Multiphysics 5.6). Finally, through process fabrication, we achieved a spurious-free S1 mode resonator, with the effective electromechanical coupling coefficient of 3.79% and resonance at 2.583GHz.
引用
收藏
页码：33 / 36
页数：4
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