A Lamb Wave Resonator With Trapezoidal Interdigitated Electrodes

被引：1
|
作者：
Chen, Xiang [1 ]
Qu, Yuanhang [1 ]
Luo, Tiancheng [2 ]
Gu, Xiyu [3 ]
Huang, Xiaoming [3 ]
Cai, Yao [1 ]
Guo, Shishang [3 ]
Liu, Yan [4 ]
Sun, Chengliang [1 ]
机构：
[1] Wuhan Univ, Inst Technol Sci, Wuhan, Peoples R China
[2] Agcy Sci Technol & Res, Inst Mat Res & Engn, Singapore, Singapore
[3] Wuhan Univ, Sch Phys & Technol, Wuhan, Peoples R China
[4] Hubei Yangtze Memory Labs, Wuhan, Peoples R China
来源：
2024 IEEE MTT-S INTERNATIONAL CONFERENCE ON MICROWAVE ACOUSTICS & MECHANICS, IC-MAM | 2024年
基金：
中国博士后科学基金; 中国国家自然科学基金;
关键词：
Lamb wave resonator; aluminum nitride; spurious mode;
D O I：
10.1109/IC-MAM60575.2024.10538492
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Due to its multimodal characteristics, filters composed of aluminum nitride-based Lamb wave resonators are easily susceptible to interference from spurious modes. This paper constructed trapezoidal interdigitated electrodes based on modal vibration patterns and dispersion characteristics, and verified their suppression effect on spurious modes through simulation software (COMSOL Multiphysics 5.6). Finally, through process fabrication, we achieved a spurious-free S1 mode resonator, with the effective electromechanical coupling coefficient of 3.79% and resonance at 2.583GHz.
引用
收藏
页码：33 / 36
页数：4
相关论文
共 50 条
  • [21] Particle Manipulation by a Novel Lamb Wave Resonator Array with Grating Reflectors
    Wang, Suge
    Wang, Zhaoxun
    Ning, Yuan
    Chen, Xuejiao
    Duan, Xuexin
    Pang, Wei
    Yang, Qingrui
    PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2020,
  • [22] A Graphene Field Effect Transistor Driven by a MEMS Lamb Wave Resonator
    Liang J.
    Sun C.
    Tianjin Daxue Xuebao (Ziran Kexue yu Gongcheng Jishu Ban)/Journal of Tianjin University Science and Technology, 2019, 52 (06): : 594 - 600
  • [23] LAMB-WAVE DELAY-LINES WITH INTERDIGITAL ELECTRODES
    TODA, K
    JOURNAL OF APPLIED PHYSICS, 1973, 44 (01) : 56 - 62
  • [24] Lamb Plate Modes and Surface Acoustic Wave Resonator Microwave Filters
    McHugh, S.
    Turner, P. J.
    Yantchev, V.
    Plessky, V.
    2015 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2015,
  • [25] The trapezoidal dielectric resonator antenna
    Almpanis, Georgios
    Fumeaux, Christophe
    Vahldieck, Ruediger
    IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2008, 56 (09) : 2810 - 2816
  • [26] On the impedance response of interdigitated electrodes
    Dizon, Arthur
    Orazem, Mark E.
    ELECTROCHIMICA ACTA, 2019, 327
  • [27] Fabrication of nano interdigitated electrodes
    Berdondini, L
    Kalbac, M
    Gautsch, S
    Gullo, M
    Staufer, U
    Koudelka-Hep, M
    de Rooij, NF
    SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2, 2003, 5116 : 402 - 405
  • [28] Humidity Sensor Based on Lamb Wave Resonator with Different Graphene Oxide Film
    Pang, Jintao
    Le, Xianhao
    Huang, Wei
    Xie, Jin
    2018 13TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS 2018), 2018, : 280 - 283
  • [29] Intermediate frequency lamb wave coupled resonator filters for RF receiver architectures
    Desvergne, M.
    Defay, E.
    Wolozan, D.
    Aid, M.
    Vincent, P.
    Volatier, A.
    ESSDERC 2007: PROCEEDINGS OF THE 37TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE, 2007, : 358 - +
  • [30] Thin-film zero-group-velocity Lamb wave resonator
    Yantchev, Ventsislav
    Arapan, Lilia
    Katardjiev, Ilia
    Plessky, Victor
    APPLIED PHYSICS LETTERS, 2011, 99 (03)
12345