A Lamb Wave Resonator With Trapezoidal Interdigitated Electrodes

被引：1
|
作者：
Chen, Xiang [1 ]
Qu, Yuanhang [1 ]
Luo, Tiancheng [2 ]
Gu, Xiyu [3 ]
Huang, Xiaoming [3 ]
Cai, Yao [1 ]
Guo, Shishang [3 ]
Liu, Yan [4 ]
Sun, Chengliang [1 ]
机构：
[1] Wuhan Univ, Inst Technol Sci, Wuhan, Peoples R China
[2] Agcy Sci Technol & Res, Inst Mat Res & Engn, Singapore, Singapore
[3] Wuhan Univ, Sch Phys & Technol, Wuhan, Peoples R China
[4] Hubei Yangtze Memory Labs, Wuhan, Peoples R China
来源：
2024 IEEE MTT-S INTERNATIONAL CONFERENCE ON MICROWAVE ACOUSTICS & MECHANICS, IC-MAM | 2024年
基金：
中国博士后科学基金; 中国国家自然科学基金;
关键词：
Lamb wave resonator; aluminum nitride; spurious mode;
D O I：
10.1109/IC-MAM60575.2024.10538492
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Due to its multimodal characteristics, filters composed of aluminum nitride-based Lamb wave resonators are easily susceptible to interference from spurious modes. This paper constructed trapezoidal interdigitated electrodes based on modal vibration patterns and dispersion characteristics, and verified their suppression effect on spurious modes through simulation software (COMSOL Multiphysics 5.6). Finally, through process fabrication, we achieved a spurious-free S1 mode resonator, with the effective electromechanical coupling coefficient of 3.79% and resonance at 2.583GHz.
引用
收藏
页码：33 / 36
页数：4
相关论文
共 50 条
  • [1] Spurious-Free S1 Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes
    Luo, Tiancheng
    Xu, Qinwen
    Wen, Zhiwei
    Qu, Yuanhang
    Zhou, Jie
    Lin, Binghui
    Cai, Yao
    Liu, Yan
    Sun, Chengliang
    IEEE ELECTRON DEVICE LETTERS, 2023, 44 (04) : 574 - 577
  • [2] Analysis of a tunable piezoelectric resonator using interdigitated electrodes
    Frederick, Amanda A.
    Hu, Hsin-Hua
    Clark, William W.
    Proceedings of the ASME Design Engineering Division 2005, Pts A and B, 2005, : 461 - 467
  • [3] A Monolithic Interdigitated PVDF Transducer for Lamb Wave Inspection
    Gu, Hua
    Wang, Ming L.
    STRUCTURAL HEALTH MONITORING-AN INTERNATIONAL JOURNAL, 2009, 8 (02): : 137 - 148
  • [4] Interdigitated PVDF transducer for Lamb wave generation and reception
    Gu, H
    Lloyd, GM
    Wang, ML
    SMART STRUCTURES AND MATERIALS 2005: SENSORS AND SMART STRUCTURES TECHNOLOGIES FOR CIVIL, MECHANICAL, AND AEROSPACE, PTS 1 AND 2, 2005, 5765 : 302 - 312
  • [5] A Modified PiBVD Model for Lamb Wave Resonator
    Wang, Yong
    Hong, Yan
    Goh, Wang Ling
    Mu, Xiaojing
    Chai, Kevin T-C
    2016 INTERNATIONAL SYMPOSIUM ON INTEGRATED CIRCUITS (ISIC), 2016,
  • [6] Lamb-wave resonator for microphone application
    Meltaus, Johanna
    Ylilammi, Markku
    Dekker, James
    Riekkinen, Tommi
    Rantakari, Pekka
    Nurmela, Arto
    Pensala, Tuomas
    Harrington, Brandon P.
    Lautenschlager, Eric
    2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2014, : 388 - 391
  • [7] A MODIFIED PIBVD MODEL FOR LAMB WAVE RESONATOR
    Wang, Yong
    Hong, Yan
    Goh, Wang Ling
    Mu, Xiaojing
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2017, 59 (03) : 703 - 706
  • [8] Modeling of Interdigitated Electrodes and Supercapacitors with Porous Interdigitated Electrodes
    Latimer, Katherine J.
    Evans, James W.
    Cowell, Martin A.
    Wright, Paul K.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2017, 164 (04) : A930 - A936
  • [9] Integration of Interdigitated Electrodes in Split-Ring Resonator for Detecting Liquid Mixtures
    Bao, Xiue
    Zhang, Meng
    Ocket, Ilja
    Bao, Juncheng
    Kil, Dries
    Liu, Zhuangzhuang
    Puers, Robert
    Schreurs, Dominique
    Nauwelaers, Bart
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2020, 68 (06) : 2080 - 2089
  • [10] Lamb-wave-type high frequency resonator
    Nakagawa, Y. (nakagawa@es.yamanashi.ac.jp), 1600, Japan Society of Applied Physics (42):
12345