The impact of the epoxy thin-film layer for microwave-based gas sensors working at high relative humidity levels

被引：0
|
作者：
Grochala, Dominik [1 ]
Paleczek, Anna [1 ]
Kocon, Mateusz [1 ]
Dudzik, Maciej [1 ]
Blajszczak, Lukasz [2 ]
Staszek, Kamil [3 ]
Wojcikowski, Marek [4 ]
Cao, Tuan-Vu [5 ]
Rydosz, Artur [1 ]
机构：
[1] AGH Univ Krakow, Biomarkers Anal LAB, Al Mickiewicza 30, PL-30059 Krakow, Poland
[2] AGH Univ Krakow, Dept Surface Engn & Mat Characterizat, Al Mickiewicza 30, PL-30059 Krakow, Poland
[3] AGH Univ Krakow, Microwave Res Grp, Al Mickiewicza 30, PL-30059 Krakow, Poland
[4] Gdansk Univ Technol, Dept Microelect Syst, Narutowicza 11-12, PL-80233 Gdansk, Poland
[5] Norwegian Inst Air Res, Kjeller, Norway
来源：
2024 4TH URSI ATLANTIC RADIO SCIENCE MEETING, AT-RASC 2024 | 2024年
关键词：
D O I：
10.46620/URSIATRASC24/ELJV5678
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, the impact of the epoxy thin-film layer on microwave-based gas sensors working at 50% and 90% relative humidity levels is discussed. The microwave-based gas sensor was designed in the form of a meander-type transmission line working at 5.8 GHz with an eight-port reflectometer part. The gas-sensing layer was designed based on the thin tin dioxide film deposited by the utilization of magnetron sputtering technology and an additional epoxy thin-film layer was used. The obtained results have shown that by application of a thin epoxy layer, the impact of the high RH levels for gas sensor response can be reduced. The obtained results can be used to further optimize the microwave-based sensing elements for various applications including gas sensors where high relative humidity levels are expected to exist.
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页数：4
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