The impact of the epoxy thin-film layer for microwave-based gas sensors working at high relative humidity levels

被引：0

作者：

Grochala, Dominik ^{[1
]}

Paleczek, Anna ^{[1
]}

Kocon, Mateusz ^{[1
]}

Dudzik, Maciej ^{[1
]}

Blajszczak, Lukasz ^{[2
]}

Staszek, Kamil ^{[3
]}

Wojcikowski, Marek ^{[4
]}

Cao, Tuan-Vu ^{[5
]}

Rydosz, Artur ^{[1
]}

机构：

[1] AGH Univ Krakow, Biomarkers Anal LAB, Al Mickiewicza 30, PL-30059 Krakow, Poland

[2] AGH Univ Krakow, Dept Surface Engn & Mat Characterizat, Al Mickiewicza 30, PL-30059 Krakow, Poland

[3] AGH Univ Krakow, Microwave Res Grp, Al Mickiewicza 30, PL-30059 Krakow, Poland

[4] Gdansk Univ Technol, Dept Microelect Syst, Narutowicza 11-12, PL-80233 Gdansk, Poland

[5] Norwegian Inst Air Res, Kjeller, Norway

来源：

2024 4TH URSI ATLANTIC RADIO SCIENCE MEETING, AT-RASC 2024 | 2024年

关键词：

D O I：

10.46620/URSIATRASC24/ELJV5678

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, the impact of the epoxy thin-film layer on microwave-based gas sensors working at 50% and 90% relative humidity levels is discussed. The microwave-based gas sensor was designed in the form of a meander-type transmission line working at 5.8 GHz with an eight-port reflectometer part. The gas-sensing layer was designed based on the thin tin dioxide film deposited by the utilization of magnetron sputtering technology and an additional epoxy thin-film layer was used. The obtained results have shown that by application of a thin epoxy layer, the impact of the high RH levels for gas sensor response can be reduced. The obtained results can be used to further optimize the microwave-based sensing elements for various applications including gas sensors where high relative humidity levels are expected to exist.

引用

页数：4

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