ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF COBALT AND FORMATION OF COBALT DISILICIDE

被引：53
|
作者：
GROSS, ME
KRANZ, KS
BRASEN, D
LUFTMAN, H
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 05期
关键词：
D O I：
10.1116/1.584212
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1548 / 1552
页数：5
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