ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF COBALT AND FORMATION OF COBALT DISILICIDE

被引：53
|
作者：
GROSS, ME
KRANZ, KS
BRASEN, D
LUFTMAN, H
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 05期
关键词：
D O I：
10.1116/1.584212
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1548 / 1552
页数：5
相关论文
共 50 条
  • [21] Pulsed chemical vapor deposition of cobalt and cobalt carbide thin films
    Chen, Sen
    Zhang, Xiangyu
    Liu, Bowen
    Liu, Zhongwei
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2022, 40 (02):
  • [22] Chemical vapor deposition of cobalt using novel cobalt(I) precursors
    Choi, Hyungsoo
    Park, Sungho
    Jang, Ho G.
    2002, Materials Research Society (17)
  • [23] Chemical vapor deposition of cobalt using novel cobalt(I) precursors
    Choi, H
    Park, S
    Jang, HG
    JOURNAL OF MATERIALS RESEARCH, 2002, 17 (02) : 267 - 270
  • [24] CHEMICAL VAPOR DEPOSITION OF COBALT METAL FROM COBALT(2) ACETYLACETONATE
    CHARLES, RG
    HAVERLAC.PG
    JOURNAL OF INORGANIC & NUCLEAR CHEMISTRY, 1969, 31 (04): : 995 - &
  • [25] ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF GAAS AND ALGAAS FOR MICROWAVE APPLICATIONS
    MENNA, RJ
    NARAYAN, SY
    SMITH, RT
    ABRAHAMS, MS
    MAGEE, CW
    RCA REVIEW, 1986, 47 (04): : 578 - 617
  • [26] CHEMICAL VAPOR-DEPOSITION - NEW OPPORTUNITIES FOR THE INORGANIC AND ORGANOMETALLIC CHEMIST
    GIROLAMI, GS
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1987, 194 : 2 - ACSC
  • [27] LOW-TEMPERATURE ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF PLATINUM
    CHEN, YJ
    KAESZ, HD
    THRIDANDAM, H
    HICKS, RF
    APPLIED PHYSICS LETTERS, 1988, 53 (17) : 1591 - 1592
  • [28] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD - THE EFFECT OF ORGANOMETALLIC STRUCTURE
    BAUM, TH
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (10) : 2616 - 2619
  • [29] EPITAXIAL GARNET-FILMS BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
    COWHER, ME
    SEDGWICK, TO
    LANDERMANN, J
    JOURNAL OF ELECTRONIC MATERIALS, 1974, 3 (03) : 621 - 633
  • [30] GAAS-MESFET PREPARED BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
    MORKOC, H
    ANDREWS, J
    AEBI, V
    ELECTRONICS LETTERS, 1979, 15 (04) : 105 - 106
12345