ADHESION MEASUREMENT OF POLYMER-FILMS AND COATINGS WITH SPECIAL REFERENCE TO PHOTORESIST MATERIALS

被引：0

作者：

MITTAL, KL ^{[1
]}

LUSSOW, RO ^{[1
]}

机构：

[1] IBM CORP,HOPEWELL JUNCTION,NY 12533

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1979年 / APR期

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：111 / &

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