ADHESION MEASUREMENT OF POLYMER-FILMS AND COATINGS WITH SPECIAL REFERENCE TO PHOTORESIST MATERIALS

被引：0
|
作者：
MITTAL, KL [1 ]
LUSSOW, RO [1 ]
机构：
[1] IBM CORP,HOPEWELL JUNCTION,NY 12533
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1979年 / APR期
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：111 / &
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