FINAL PUMPING OF DEPOSITION APPARATUS WITH ORBITRON PUMP

被引：0
|
作者：
HAJEK, Z
机构：
来源：
CESKOSLOVENSKY CASOPIS PRO FYSIKU SEKCE A | 1969年 / 19卷 / 04期
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中图分类号：
O4 [物理学];
学科分类号：
0702 ;
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页码：418 / &
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