FINAL PUMPING OF DEPOSITION APPARATUS WITH ORBITRON PUMP

被引：0

作者：

HAJEK, Z

机构：

来源：

CESKOSLOVENSKY CASOPIS PRO FYSIKU SEKCE A | 1969年 / 19卷 / 04期

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D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：418 / &

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