DEPTH PROFILING BY ION MICROPROBE WITH HIGH MASS RESOLUTION

被引:19
|
作者
DEGREVE, F
FIGARET, R
LATY, P
机构
关键词
D O I
10.1016/0020-7381(79)80005-4
中图分类号
O64 [物理化学(理论化学)、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号
070203 ; 070304 ; 081704 ; 1406 ;
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页码:351 / 361
页数:11
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