DEPTH PROFILING BY ION MICROPROBE WITH HIGH MASS RESOLUTION

被引：19

|

作者：

DEGREVE, F

FIGARET, R

LATY, P

机构：

来源：

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES | 1979年 / 29卷 / 04期

关键词：

D O I：

10.1016/0020-7381(79)80005-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

摘要：

引用

收藏

页码：351 / 361

页数：11

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