THE INFLUENCE OF SURFACE-ROUGHNESS ON THE ELECTRICAL-RESISTIVITY OF EVAPORATED COPPER-FILMS

被引:0
|
作者
GEBHARDT, R
LANG, M
WISSMANN, P
机构
[1] Univ Erlangen-Nuernberg, Erlangen, West Ger, Univ Erlangen-Nuernberg, Erlangen, West Ger
来源
VAKUUM-TECHNIK | 1986年 / 35卷 / 07期
关键词
D O I
暂无
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
13
引用
收藏
页码:199 / 202
页数:4
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