THERMODYNAMIC FACTOR INFLUENCING THE GROWTH-RATE AND PURITY OF EPITAXIAL LAYERS IN THE GA-ASCL3-H2 SYSTEM

被引:11
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作者
MORIZANE, K
MORI, Y
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D O I
10.1016/0022-0248(78)90429-3
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O7 [晶体学];
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0702 ; 070205 ; 0703 ; 080501 ;
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页码:164 / 170
页数:7
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