CHARACTERIZATION OF PHOSPHORUS LIQUID-METAL ION-SOURCE AS A DOPANT SOURCE IN FOCUSED ION-BEAM SYSTEMS

被引：6
|
作者：
HIGUCHIRUSLI, RH
CORELLI, JC
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 03期
关键词：
D O I：
10.1063/1.340099
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：603 / 610
页数：8
相关论文
共 50 条
  • [41] A DESIGN OF LARGE CURRENT ION GUN EMPLOYING LIQUID-METAL ION-SOURCE
    MORI, Y
    WANG, H
    ENDO, K
    YAMAUCHI, K
    IDE, T
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (07): : 1874 - 1879
  • [42] APPLICATION OF A LIQUID-METAL ION-SOURCE TO SECONDARY ION MASS-SPECTROMETRY
    GNASER, H
    FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE, 1984, 319 (6-7): : 719 - 723
  • [43] MASS AND ENERGY ANALYSES OF AN AUSI LIQUID-METAL ION-SOURCE
    KREISSIG, U
    KAHN, A
    RUEDENAUER, FG
    STEIGER, W
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1990, 23 (07) : 959 - 963
  • [44] IMPREGNATED-ELECTRODE-TYPE LIQUID-METAL ION-SOURCE
    ISHIKAWA, J
    GOTOH, Y
    TSUJI, H
    TAKAGI, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 186 - 189
  • [45] TRAJECTORY CALCULATIONS OF THE EXTRACTION REGION OF A LIQUID-METAL ION-SOURCE
    WARD, JW
    SELIGER, RL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1082 - 1086
  • [46] FIELD-EMISSION LIQUID-METAL ION-SOURCE AND TRIODE ION GUN
    KOMURO, M
    KAWAKATSU, H
    JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) : 2642 - 2645
  • [47] EVALUATION OF A LIQUID-METAL ION-SOURCE FOR SECONDARY ION MASS-SPECTROMETRY
    GNASER, H
    RUDENAUER, FG
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3): : 303 - 306
  • [48] ALUMINUM CLUSTER IONS GENERATED BY A LIQUID-METAL ION-SOURCE
    SAKAGUCHI, K
    MIHAMA, K
    SAITO, Y
    JOURNAL OF APPLIED PHYSICS, 1991, 70 (09) : 5049 - 5053
  • [49] COMPUTER-SIMULATION OF LIQUID-METAL ION-SOURCE OPTICS
    KANG, NK
    SWANSON, LW
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 30 (02): : 95 - 104
  • [50] IMPREGNATED-ELECTRODE-TYPE LIQUID-METAL ION-SOURCE
    ISHIKAWA, J
    TAKAGI, T
    VACUUM, 1986, 36 (11-12) : 825 - 831
12345