CHARACTERIZATION OF PHOSPHORUS LIQUID-METAL ION-SOURCE AS A DOPANT SOURCE IN FOCUSED ION-BEAM SYSTEMS

被引：6
|
作者：
HIGUCHIRUSLI, RH
CORELLI, JC
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 03期
关键词：
D O I：
10.1063/1.340099
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：603 / 610
页数：8
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