CHARACTERIZATION OF PHOSPHORUS LIQUID-METAL ION-SOURCE AS A DOPANT SOURCE IN FOCUSED ION-BEAM SYSTEMS

被引：6

作者：

HIGUCHIRUSLI, RH

CORELLI, JC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 03期

关键词：

D O I：

10.1063/1.340099

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：603 / 610

页数：8

共 50 条

[1] BEAM INTERACTIONS IN A FOCUSED ION-BEAM SYSTEM WITH A LIQUID-METAL ION-SOURCE
DEJAGER, PWH
VIJGEN, LJ
MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) : 107 - 110
[2] DEVELOPMENT OF BORON LIQUID-METAL ION-SOURCE FOR FOCUSED ION-BEAM SYSTEM
HIGUCHIRUSLI, RH
CADIEN, KC
CORELLI, JC
STECKL, AJ
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 190 - 194
[3] ENERGY SPREAD OF BORON PALLADIUM LIQUID-METAL ION-SOURCE AND CHARACTERIZATION WITH FOCUSED ION-BEAM SYSTEM
HIGUCHIRUSLI, R
REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (06): : 3459 - 3464
[4] USE OF THE LIQUID-METAL ION-SOURCE FOR FOCUSED BEAM APPLICATIONS
SWANSON, LW
APPLIED SURFACE SCIENCE, 1994, 76 (1-4) : 80 - 88
[5] DESIGN OF A HIGH-RESOLUTION FOCUSED ION-BEAM SYSTEM USING LIQUID-METAL ION-SOURCE
ZHOU, L
ORLOFF, J
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 1721 - 1724
[6] BEAM DYNAMICS OF A LIQUID-METAL ION-SOURCE
WHEALTON, JH
MESZAROS, PS
ROTHE, KE
RARIDON, RJ
RYAN, PM
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01): : 568 - 570
[7] FOCUSED DROPLET BEAM FROM A GOLD LIQUID-METAL ION-SOURCE
BENASSAYAG, G
ORLOFF, J
SWANSON, LW
JOURNAL DE PHYSIQUE, 1986, 47 (C-7): : 389 - 397
[8] CHARACTERISTICS OF A LIQUID-METAL ION-SOURCE
ZHOU, F
MA, M
WANG, W
HUA, M
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2): : 143 - 145
[9] EXPERIMENTAL-STUDY ON THE INFLUENCE OF LIQUID-METAL ION-SOURCE ENERGY-DISTRIBUTION ON FOCUSED ION-BEAM INDUCED DEPOSITION
YASAKA, A
YAMAOKA, T
KAITO, T
ADACHI, T
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (05): : 2642 - 2647
[10] LIQUID-METAL ION SOURCES AND APPLICATIONS IN FOCUSED ION-BEAM SYSTEMS
CORELLI, JC
HIGUCHIRUSLI, R
BALAKRISHNAN, S
LIEBMANN, L
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03): : 936 - 936

← 1 2 3 4 5 →