DEEP DEFECT STATES IN EVAPORATED HETEROEPITAXIAL SILICON FILMS

被引:0
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作者
ECKE, W [1 ]
LEBEDEV, AA [1 ]
MAMADALIMOV, AT [1 ]
机构
[1] AF IOFFE ENGN PHYS INST,LENINGRAD,USSR
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D O I
10.1002/pssa.2210470221
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:507 / 512
页数:6
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