SINGLE-STEP OPTICAL LIFT-OFF PROCESS

被引：166
|
作者：
HATZAKIS, M
CANAVELLO, BJ
SHAW, JM
机构：
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1980年 / 24卷 / 04期
关键词：
D O I：
10.1147/rd.244.0452
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：452 / 460
页数：9
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