FILM FORMATION AND STRUCTURE CONTROL BY IONIZED CLUSTER BEAM

被引：0
|
作者：
USUI, H
TAKAOKA, HG
YAMADA, I
TAKAGI, T
机构：
来源：
NIPPON KAGAKU KAISHI | 1987年 / 11期
关键词：
D O I：
10.1246/nikkashi.1987.1908
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
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页码：1908 / 1915
页数：8
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