PLASMA CHEMISTRY OF FLUOROCARBONS AS RELATED TO PLASMA-ETCHING AND PLASMA POLYMERIZATION

被引：0
|
作者：
KAY, E
COBURN, J
DILKS, A
机构：
来源：
TOPICS IN CURRENT CHEMISTRY | 1980年 / 94卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
收藏
页码：1 / 42
页数：42
相关论文
共 50 条
  • [31] DENSE RF PLASMA-ETCHING
    BOUCHOULE, A
    HENRY, D
    LAURE, C
    RANSON, P
    SALAH, D
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (08) : C310 - C310
  • [32] PLASMA-ETCHING WITH MAGNETIC CONFINEMENT
    WICKER, TE
    MANTEI, TD
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (03) : C86 - C86
  • [33] PHOTON ASSISTED PLASMA-ETCHING
    HOLBER, WM
    OSGOOD, RM
    SOLID STATE TECHNOLOGY, 1987, 30 (04) : 139 - 143
  • [34] PLASMA-ETCHING - A DISCUSSION OF MECHANISMS
    COBURN, JW
    WINTERS, HF
    CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1981, 10 (02): : 119 - 141
  • [35] EFFECT OF PHOTORESIST ON PLASMA-ETCHING
    TSOU, LY
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (11) : C624 - C625
  • [36] SPECTROSCOPIC ANALYSIS OF PLASMA-ETCHING
    VALYI, G
    SCHILLER, V
    SZABO, I
    ACTA PHYSICA ACADEMIAE SCIENTIARUM HUNGARICAE, 1980, 49 (1-3): : 167 - 167
  • [37] FILM DEPOSITION IN PLASMA-ETCHING
    POLL, HU
    MEICHSNER, J
    STEINRUCKEN, A
    THIN SOLID FILMS, 1984, 112 (04) : 369 - 380
  • [38] ADVANCES IN VLSI PLASMA-ETCHING
    LAM, DK
    SOLID STATE TECHNOLOGY, 1982, 25 (04) : 215 - 219
  • [39] PLASMA-ETCHING OF NONOXIDE CERAMICS
    MITOMO, M
    SATO, Y
    YASHIMA, I
    TSUTSUMI, M
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1991, 10 (02) : 83 - 84
  • [40] SELECTIVE PLASMA-ETCHING OF POLYSILICON
    CHANG, PC
    HSIA, S
    SOLID STATE TECHNOLOGY, 1984, 27 (04) : 225 - 228
12345