RAMAN-SPECTROSCOPIC CHARACTERIZATION OF THIN CARBON-FILMS

被引：0
|
作者：
SALZER, VR
ROLAND, U
DRUMMER, H
SUMMCHEN, L
KOLITSCH, A
DRESCHER, D
机构：
[1] ROSSENDORF INC,FORSCHUNGSZENTRUM ROSSENDORF EV,INST IONENSTRAHLPHYS & MAT FORSCH,D-01314 DRESDEN,GERMANY
[2] FRAUNHOFER INST WERKSTOFFPHYS & SCHICHTTECHNOL,D-01069 DRESDEN,GERMANY
来源：
ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-INTERNATIONAL JOURNAL OF RESEARCH IN PHYSICAL CHEMISTRY & CHEMICAL PHYSICS | 1995年 / 191卷
关键词：
AMORPHOUS CARBON; THIN LAYERS; MICROSTRUCTURE; BONDING PROPERTIES; RAMAN SPECTROSCOPY;
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The microstructural growth of amorphous carbon layers is mainly determined by substrate parameters. Changes of the plasma parameters hardly influence the structure of the layer. Low substrate temperatures and a normal deposition angle favour the formation of diamond-like features. Diamond-like properties can be further increased by subsequent implantation of more than 10(16) carbon ions of medium energy (20 eV) per cm(3). The decrease of the graphite clusters in respect of their portion and/or their size can be observed in the Raman spectra before changes of the layer hardness become mechanically evident.
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页码：1 / 13
页数：13
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