RAMAN-SPECTROSCOPIC CHARACTERIZATION OF THIN CARBON-FILMS

The microstructural growth of amorphous carbon layers is mainly determined by substrate parameters. Changes of the plasma parameters hardly influence the structure of the layer. Low substrate temperatures and a normal deposition angle favour the formation of diamond-like features. Diamond-like properties can be further increased by subsequent implantation of more than 10(16) carbon ions of medium energy (20 eV) per cm(3). The decrease of the graphite clusters in respect of their portion and/or their size can be observed in the Raman spectra before changes of the layer hardness become mechanically evident.