SEM AND EMPA ANALYSIS OF IMPURITIES RELATED TO GAAS SUBSTRATES AND MBE GROWN GAAS-LAYERS

被引：1
|
作者：
KADHIM, NJ [1 ]
MUKHERJEE, D [1 ]
机构：
[1] S BANK POLYTECH,DEPT ELECT & ELECTR ENGN,LONDON,ENGLAND
来源：
VACUUM | 1988年 / 38卷 / 01期
关键词：
D O I：
10.1016/0042-207X(88)90249-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
10
引用
收藏
页码：11 / 12
页数：2
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