AMORPHOUS HYDROGENATED CARBON-FILMS ON SEMICONDUCTORS .1. ELECTRONIC-PROPERTIES OF THE INTERFACE

被引：30
|
作者：
UGOLINI, D [1 ]
EITLE, J [1 ]
OELHAFEN, P [1 ]
WITTMER, M [1 ]
机构：
[1] IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, NY 10598 USA
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 48卷 / 06期
关键词：
D O I：
10.1007/BF00617856
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：549 / 558
页数：10
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