LASER ANNEALING OF SELF-ION DAMAGED SILICON

被引：4
|
作者：
FOTI, G [1 ]
CAMPISANO, SU [1 ]
BAERI, P [1 ]
RIMINI, E [1 ]
TSENG, WF [1 ]
机构：
[1] USN,RES LAB,WASHINGTON,DC 20375
来源：
APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 09期
关键词：
D O I：
10.1063/1.91260
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：701 / 703
页数：3
相关论文
共 50 条
  • [41] Compression of self-ion implanted iron micropillars
    Grieveson, E. M.
    Armstrong, D. E. J.
    Xu, S.
    Roberts, S. G.
    JOURNAL OF NUCLEAR MATERIALS, 2012, 430 (1-3) : 119 - 124
  • [42] SPUTTERING FROM ENERGETIC SELF-ION CASCADES
    MERKLE, KL
    PRONKO, PP
    JOURNAL OF NUCLEAR MATERIALS, 1974, 53 (01) : 231 - 237
  • [43] INFLUENCE OF THE THICKNESS OF DAMAGED LAYERS ON THE MIGRATION OF DOPANDS DURING LASER ANNEALING IN IMPLANTED SILICON
    DVURECHENSKII, AV
    MUSTAFIN, TN
    SMIRNOV, LS
    GEILER, HD
    GOTZ, G
    JAHN, U
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1981, 63 (02): : K203 - K206
  • [44] THEORETICAL INVESTIGATION OF LASER ANNEALING OF ION-IMPLANTED SILICON
    WANG, JC
    WOOD, RF
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (03): : 393 - 393
  • [45] LASER ANNEALING STUDIES ON ION-IMPLANTED IRON IN SILICON
    DAMGAARD, S
    ORON, M
    PETERSEN, JW
    PETRIKIN, YV
    WEYER, G
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 59 (01): : 63 - 67
  • [46] DEPTH DISTRIBUTION OF SELF-ION DAMAGE IN NICKEL
    NARAYAN, J
    OEN, OS
    JOURNAL OF NUCLEAR MATERIALS, 1977, 66 (1-2) : 158 - 162
  • [47] SELF ANNEALING OF ION-IMPLANTED SILICON - SUGGESTION FOR AN EXPERIMENT
    MERLI, PG
    ZIGNANI, F
    RADIATION EFFECTS LETTERS, 1980, 50 (3-6): : 115 - 118
  • [48] SELF ANNEALING OF ION-IMPLANTED SILICON - SUGGESTION FOR AN EXPERIMENT
    MERLI, PG
    ZIGNANI, F
    RADIATION EFFECTS LETTERS, 1980, 57 (1-2): : 59 - 62
  • [49] SELF ANNEALING OF ION IMPLANTED SILICON: SUGGESTION FOR AN EXPERIMENT.
    Merli, P.G.
    Zignani, F.
    Radiation effects letters, 1980, 57 (1-2): : 59 - 62
  • [50] FRACTIONATION EFFECT IN ANNEALING OF RADIATION DAMAGED SILICON
    FANG, PH
    RYAN, JL
    TARKO, HB
    PHYSICS LETTERS A, 1970, A 33 (02) : 75 - &
12345