SURFACE-TOPOGRAPHY OF ETCHED GAAS-SURFACES

被引：8

作者：

SETHI, BR ^{[1
]}

HARTNAGEL, HL ^{[1
]}

JOURDAN, G ^{[1
]}

机构：

[1] TH DARMSTADT,INST ANGEW PHYS,D-6100 DARMSTADT,FED REP GER

来源：

关键词：

ACIDIC ETCHING - DOUBLE REPLICA TEM - ISLAND-TYPE FEATURES - SMOOTH SURFACES - SURFACE TOPOGRAPHY;

D O I：

10.1080/00207218608920816

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：561 / 563

页数：3

共 50 条

[41] LASER BILAYER ETCHING OF GAAS-SURFACES
MAKI, PA
EHRLICH, DJ
APPLIED PHYSICS LETTERS, 1989, 55 (02) : 91 - 94
[42] THE CHEMISTRY OF SULFUR PASSIVATION OF GAAS-SURFACES
SHIN, J
GEIB, KM
WILMSEN, CW
LILLIENTALWEBER, Z
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03): : 1894 - 1898
[43] LASER CLEANING OF GAAS-SURFACES INVACUO
RODWAY, DC
CULLIS, AG
WEBBER, HC
APPLIED SURFACE SCIENCE, 1980, 6 (01) : 76 - 81
[44] PHOTO-ELECTROCHEMICAL PASSIVATION OF GAAS-SURFACES
WOODALL, JM
OELHAFEN, P
JACKSON, TN
FREEOUF, JL
PETTIT, GD
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (03): : 795 - 798
[45] PASSIVATION OF GAAS-SURFACES BY GAOXNY FILMS AND BY MULTILAYERS
SHIOTA, I
MIYAMOTO, N
NISHIZAWA, J
SURFACE SCIENCE, 1979, 86 (JUL) : 272 - 279
[46] GROWTH AND SURFACE-TOPOGRAPHY OF CADMIUM FILMS
SINGH, A
HARENDRANATH, CS
JOURNAL OF MATERIALS SCIENCE, 1983, 18 (12) : 3606 - 3610
[47] SURFACE-TOPOGRAPHY OF LASER ANNEALED SILICON
HANEMAN, D
NEMANICH, RJ
SOLID STATE COMMUNICATIONS, 1982, 43 (03) : 203 - 206
[48] SURFACE-TOPOGRAPHY AND ROLLING ELEMENT VIBRATION
SAYLES, RS
POON, SY
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1981, 3 (03): : 137 - 144
[49] AVANT-GARDE SURFACE-TOPOGRAPHY
不详
PHYSICS WORLD, 1991, 4 (09) : 29 - 29
[50] SURFACE-TOPOGRAPHY AS A NONSTATIONARY RANDOM PROCESS
SAYLES, RS
THOMAS, TR
NATURE, 1978, 271 (5644) : 431 - 434