SURFACE-TOPOGRAPHY OF ETCHED GAAS-SURFACES

被引：8
|
作者：
SETHI, BR [1 ]
HARTNAGEL, HL [1 ]
JOURDAN, G [1 ]
机构：
[1] TH DARMSTADT,INST ANGEW PHYS,D-6100 DARMSTADT,FED REP GER
来源：
INTERNATIONAL JOURNAL OF ELECTRONICS | 1986年 / 60卷 / 05期
关键词：
ACIDIC ETCHING - DOUBLE REPLICA TEM - ISLAND-TYPE FEATURES - SMOOTH SURFACES - SURFACE TOPOGRAPHY;
D O I：
10.1080/00207218608920816
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：561 / 563
页数：3
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