SIMPLE DESIGN OF A HIGH-TEMPERATURE OXIDIZING FURNACE FOR INTEGRATED-OPTICS PROCESSING

被引：0

作者：

PASTOR, AC ^{[1
]}

TANGONAN, GL ^{[1
]}

机构：

[1] HUGHES RES LABS,MALIBU,CA 90265

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1977年 / 48卷 / 06期

关键词：

D O I：

10.1063/1.1135090

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：709 / 710

页数：2

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