SIMPLE DESIGN OF A HIGH-TEMPERATURE OXIDIZING FURNACE FOR INTEGRATED-OPTICS PROCESSING

被引：0
|
作者：
PASTOR, AC [1 ]
TANGONAN, GL [1 ]
机构：
[1] HUGHES RES LABS,MALIBU,CA 90265
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1977年 / 48卷 / 06期
关键词：
D O I：
10.1063/1.1135090
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：709 / 710
页数：2
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