PREPARATION OF ZNO FILMS BY REACTIVE EVAPORATION

被引：36
|
作者：
JIN, M
YING, LS
机构：
[1] Institute of Optoelectronic Materials and Devices, Shandong University
来源：
THIN SOLID FILMS | 1994年 / 237卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(94)90230-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Zinc oxide (ZnO) films were deposited on heated glass substrates by evaporating zinc chloride (ZnCl2) in oxygen. Structural, optical and electrical properties of the deposited films were investigated. High-transparency films with resistivity as low as 3.5 x 10(-3) Omega cm could be prepared by adjusting parameters. The energy gap of ZnO film was evaluated as 3.3 eV from optical absorption measurements. The electron carrier densities in the range (4-12) x 10(19) cm(-3) and mobilities of 10-40 cm(2) V-1 s(-1) were observed.
引用
收藏
页码：16 / 18
页数：3
相关论文
共 50 条
  • [1] PREPARATION OF ZNO FILMS BY ACTIVATED REACTIVE EVAPORATION
    SWAMY, HG
    REDDY, PJ
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1990, 5 (09) : 980 - 981
  • [2] Preparation of ZnO films by activated reactive evaporation
    Swamy, H.Gopala
    Reddy, P.Jayarama
    Semiconductor Science and Technology, 1990, 5 (09): : 980 - 981
  • [3] Properties of ZnO thin films prepared by reactive evaporation
    Ramirez, A. A.
    Ramirez, E. A.
    Gordillo, G.
    2015 IEEE 42ND PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), 2015,
  • [4] Properties of ZnO thin films prepared by reactive evaporation
    Gordillo, G
    Calderón, C
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2001, 69 (03) : 251 - 260
  • [5] Analysis of a plasma-assisted reactive evaporation process for preparation of ZnO thin films: Modeling and experimentation
    Ramirez, Asdrubal A.
    Gil, Ivan
    Gordillo, Gerardo
    Latifi, Abderrazak M.
    THIN SOLID FILMS, 2020, 698
  • [6] Optical and electrical properties of ZnO films deposited by activated reactive evaporation
    Yuvaraj, D.
    Rao, K. Narasimha
    VACUUM, 2008, 82 (11) : 1274 - 1279
  • [7] Preparation of lead zirconate titanate thin films by reactive evaporation
    Torii, Kazuyoshi
    Saitoh, Sakae
    Ohji, Yuzuru
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1994, 33 (9 B): : 5287 - 5290
  • [8] Preparation of transparent conductive oxide films by activated reactive evaporation
    Rao, KN
    OPTICAL ENGINEERING, 2002, 41 (11) : 2705 - 2706
  • [9] PREPARATION OF PBTIO3 FILMS BY ACTIVATED REACTIVE EVAPORATION (ARE)
    OKAMURA, T
    ODA, K
    TAKADA, J
    OSAKA, A
    MIURA, Y
    TERASHIMA, T
    BANDO, Y
    NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1990, 98 (08): : 749 - 753
  • [10] ZnO films grown using a novel procedure based on the reactive evaporation method
    Oyola, J. S.
    Castro, J. M.
    Gordillo, G.
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2012, 102 : 137 - 141
12345