PROPERTIES OF ALL-NB THIN-FILM MICROBRIDGES FABRICATED BY NANOMETER PROCESS

被引：2
|
作者：
HARADA, Y [1 ]
HIROSE, N [1 ]
UZAWA, Y [1 ]
SEKINE, M [1 ]
YOSHIMORI, S [1 ]
KAWAMURA, M [1 ]
机构：
[1] TAKUSHOKU UNIV,FAC ENGN,HACHIOJI,TOKYO 193,JAPAN
来源：
PHYSICA C | 1991年 / 185卷 / pt 4期
关键词：
Microbridges - Nanometer Processes;
D O I：
10.1016/0921-4534(91)91401-O
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have fabricated all-Nb thin film microbridges by using newly developed nanometer process. These microbridges show the high sensitivity of the radiation detection. We have investigated the properties of microbridges by changing the bridge-region parameters.
引用
收藏
页码：2555 / 2556
页数：2
相关论文
共 50 条
  • [1] CHARACTERISTICS OF ALL-NB THIN-FILM MICROBRIDGES FABRICATED BY NANOMETER PROCESS
    UZAWA, Y
    HIROSE, N
    HARADA, Y
    SANO, M
    SEKINE, M
    YAMAGUCHI, K
    OZAKI, H
    HIRAO, A
    YOSHIMORI, S
    KAWAMURA, M
    IEICE TRANSACTIONS ON COMMUNICATIONS ELECTRONICS INFORMATION AND SYSTEMS, 1991, 74 (07): : 2015 - 2019
  • [2] PROPERTIES OF THE NB THIN-FILM NANOBRIDGES PREPARED BY NANOMETER FABRICATION PROCESS
    HARADA, Y
    HIROSE, N
    UZAWA, Y
    SEKINE, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (12B): : 3933 - 3937
  • [3] AC JOSEPHSON EFFECT IN SUPERCONDUCTING ALL-NB THIN-FILM NANOBRIDGES UP TO 693-GHZ
    UZAWA, Y
    KAWATE, E
    HIROSE, N
    MOTOHASHI, I
    HARADA, Y
    SEKINE, M
    MIKI, Y
    OKAJI, M
    APPLIED PHYSICS LETTERS, 1992, 61 (08) : 967 - 969
  • [4] ALL-NB THIN-FILM MICROBRIDGE-TYPE JOSEPHSON-JUNCTION FOR SUBMILLIMETER-WAVE DETECTION
    HIROSE, N
    HARADA, Y
    SEKINE, M
    YOSHIMORI, S
    KAWAMURA, M
    INFRARED PHYSICS, 1993, 34 (05): : 445 - 455
  • [5] STM IMAGING OF THIN-FILM MICROBRIDGES
    ANDERS, M
    MUCK, M
    HEIDEN, C
    EUROPEAN JOURNAL OF CELL BIOLOGY, 1987, 44 : 3 - 3
  • [6] PROPERTIES OF JOSEPHSON THIN-FILM, VARIABLE-THICKNESS MICROBRIDGES
    GUBANKOV, VN
    KOSHELETS, VP
    OVSYANNIKOV, VG
    ZHURNAL EKSPERIMENTALNOI I TEORETICHESKOI FIZIKI, 1977, 73 (04): : 1435 - 1444
  • [7] CHARACTERISTICS OF Nb THIN FILM MICROBRIDGES FABRICATED BY ELECTRON-BEAM LITHOGRAPHY.
    Shirafuji, Junji
    Matsui, Shoichi
    Hida, Hikaru
    Inuishi, Yoshio
    Technology Reports of the Osaka University, 1980, 30 (1551-1582): : 491 - 495
  • [8] THIN-FILM TRANSFORMER FABRICATED BY A DRY PROCESS
    YACHI, T
    MINO, M
    TAGO, A
    YANAGISAWA, K
    NTT REVIEW, 1992, 4 (03): : 46 - 50
  • [9] COHERENT ARRAYS OF THIN-FILM JOSEPHSON MICROBRIDGES
    HANSEN, JB
    LINDELOF, PE
    FINNEGAN, TF
    IEEE TRANSACTIONS ON MAGNETICS, 1981, 17 (01) : 95 - 98
  • [10] COLLECTIVE SYNCHRONIZATION OF ARRAYS OF SUPERCONDUCTING THIN-FILM MICROBRIDGES
    CLARK, TD
    LINDELOF, PE
    APPLIED PHYSICS LETTERS, 1976, 29 (11) : 751 - 753
12345