LASER ANNEALING FOR SOLID-PHASE THIN-FILM REACTIONS

被引：28
|
作者：
LIAU, ZL
TSAUR, BY
MAYER, JW
机构：
来源：
APPLIED PHYSICS LETTERS | 1979年 / 34卷 / 03期
关键词：
D O I：
10.1063/1.90737
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：221 / 223
页数：3
相关论文
共 50 条
  • [21] THIN-FILMS AND SOLID-PHASE REACTIONS
    MAYER, JW
    POATE, JM
    TU, KN
    SCIENCE, 1975, 190 (4211) : 228 - 234
  • [22] THIN-FILM REACTIONS
    CARTER, CB
    SIMPSON, YK
    BERICHTE DER BUNSEN-GESELLSCHAFT-PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 1986, 90 (08): : 676 - 680
  • [23] Comparison of transistor characteristics between excimer-laser and solid-phase crystallized poly-Si thin-film transistors
    Kimura, Mutsumi
    Taya, Jun
    Nakashima, Akihiro
    SOLID-STATE ELECTRONICS, 2012, 72 : 52 - 55
  • [24] Thin-film reactions
    Kotula, PG
    Johnson, MT
    Carter, CB
    ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-INTERNATIONAL JOURNAL OF RESEARCH IN PHYSICAL CHEMISTRY & CHEMICAL PHYSICS, 1998, 206 : 73 - 99
  • [25] Thin-film reactions
    Department of Chemical Engineering and Materials Science, University of Minnesota, 421 Washington Ave. SE, Minneapolis, MN 55455, United States
    不详
    Z. Phys. Chem., 1-2 (73-99):
  • [26] THIN-FILM POLYCRYSTALLINE SILICON SOLAR-CELLS PREPARED BY A SOLID-PHASE CRYSTALLIZATION METHOD
    MATSUYAMA, T
    BABA, T
    TAKAHAMA, T
    WAKISAKA, K
    TSUDA, S
    OPTOELECTRONICS-DEVICES AND TECHNOLOGIES, 1994, 9 (03): : 391 - 400
  • [27] 5% Efficient Evaporated Solid-phase Crystallised Polycrystalline Silicon Thin-film Solar Cells
    Kunz, O.
    Ouyang, Z.
    Varlamov, S.
    Aberle, A. G.
    PROGRESS IN PHOTOVOLTAICS, 2009, 17 (08): : 567 - 573
  • [28] Development of an in vitro thin-film solid-phase microextraction method to determine the bioavailability of xenoestrogens in soil
    Engler, Katherine Neafsey
    Lemley, Ann T.
    ENVIRONMENTAL TOXICOLOGY AND CHEMISTRY, 2013, 32 (09) : 1962 - 1968
  • [29] Formation of film nanostructures by means of solid-phase reactions
    Ignatenko, P. I.
    Goncharov, A. A.
    Terpiy, D. N.
    Klyakhina, N. A.
    METALLOFIZIKA I NOVEISHIE TEKHNOLOGII, 2007, 29 (01): : 135 - 144
  • [30] Extraction of trap densities in poly-Si thin-film transistors fabricated by solid-phase crystallization and dependence on temperature and time of post annealing
    Kimura, Mutsumi
    SOLID-STATE ELECTRONICS, 2010, 54 (12) : 1500 - 1504
12345