Comparison of transistor characteristics between excimer-laser and solid-phase crystallized poly-Si thin-film transistors

被引：3
|
作者：
Kimura, Mutsumi [1 ,2 ]
Taya, Jun [1 ]
Nakashima, Akihiro [1 ]
机构：
[1] Ryukoku Univ, Dept Elect & Informat, Otsu, Shiga 5202194, Japan
[2] Ryukoku Univ, Joint Res Ctr Sci & Technol, Otsu, Shiga 5202194, Japan
来源：
SOLID-STATE ELECTRONICS | 2012年 / 72卷
关键词：
Excimer-laser crystallization (ELC); Solid-phase crystallization (SPC); Poly-Si; Thin-film transistor (TFT); RECOMBINATION MODEL; SILICON; TFTS; DISPLAY;
D O I：
10.1016/j.sse.2012.02.004
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have compared transistor characteristics between excimer-laser crystallized (ELC) and solid-phase crystallized (SPC) poly-Si thin-film transistors (TFTs). First, off characteristic and characteristic parameters, such as the subthreshold swing and field-effect mobility, of the ELC TFT are superior to those of the SPC TFT, which indicates that the trap states in the ELC TFT are fewer than those in the SPC TFT. Next, the activation energy (Ea) for the on characteristic of the ELC TFT is larger than that of the SPC TFT, which originates from the difference of the grain structures. Moreover. Ea for the off characteristic of the ELC TFT is much larger than that of the SPC TFT, which is caused by the difference of the trap distribution. (c) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码：52 / 55
页数：4
相关论文
共 50 条
  • [1] Excimer laser crystallized poly-Si thin film transistors
    Gosain, DP
    FLAT PANEL DISPLAY TECHNOLOGY AND DISPLAY METROLOGY II, 2001, 4295 : 24 - 32
  • [2] Characteristic Deviation of Excimer-Laser Crystallized Poly-Si Thin-Film Transistors and Layout Design of Operational Amplifiers
    Kimura, Mutsumi
    Morii, Shota
    Ono, Yasuhiko
    Ito, Yoshihiro
    Matsuda, Tokiyoshi
    PROCEEDINGS OF 2013 TWENTIETH INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES (AM-FPD 13): TFT TECHNOLOGIES AND FPD MATERIALS, 2013, : 207 - 210
  • [3] Electrical characteristics of excimer-laser-annealed poly-Si thin-film transistors
    Lee, Woo-Hyun
    Koo, Hyun-Mo
    Cho, Won-Ju
    Jung, Jongwan
    Oh, Soon-Young
    Ahn, Chang-Geun
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2007, 51 : S241 - S244
  • [4] EXCIMER-LASER-ANNEALED POLY-SI THIN-FILM TRANSISTORS
    BROTHERTON, SD
    MCCULLOCH, DJ
    CLEGG, JB
    GOWERS, JP
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (02) : 407 - 413
  • [5] Effect of the grain growth process on the characteristics for the excimer laser crystallized poly-Si thin film transistors
    Okumura, H
    Tanabe, H
    Okumura, F
    POLYCRYSTALLINE THIN FILMS: STRUCTURE, TEXTURE, PROPERTIES, AND APPLICATIONS II, 1996, 403 : 315 - 320
  • [6] LATERAL GROWTH OF POLY-SI FILM BY EXCIMER-LASER AND ITS THIN-FILM-TRANSISTOR APPLICATION
    CHOI, DH
    SADAYUKI, E
    SUGIURA, O
    MATSUMURA, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (1A): : 70 - 74
  • [7] Electrical enhancement of solid phase crystallized poly-Si thin-film transistors with fluorine ion implantation
    Tu, Chun-Hao
    Chang, Ting- Chang
    Liu, Po-Tsun
    Chen, Chih-Hung
    Yang, Che-Yu
    Wu, Yung-Chun
    Liu, Hsin-Chou
    Chang, Li-Ting
    Tsai, Chia-Chou
    Sze, Simon M.
    Chang, Chun-Yen
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2006, 153 (09) : G815 - G818
  • [8] High-performance poly-Si thin-film transistors with excimer-laser annealed silicon-nitride gate
    Shimizu, Kazuhiro
    Nakamura, Kyoutarou
    Higashimoto, Masayuki
    Sugiura, Osamu
    Matsumura, Masakiyo
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1993, 32 (1 B): : 452 - 457
  • [9] HIGH-PERFORMANCE POLY-SI THIN-FILM TRANSISTORS WITH EXCIMER-LASER ANNEALED SILICON-NITRIDE GATE
    SHIMIZU, K
    NAKAMURA, K
    HIGASHIMOTO, M
    SUGIURA, O
    MATSUMURA, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (1B): : 452 - 457
  • [10] Performance enhancement of excimer laser crystallized poly-Si thin film transistors with fluorine implantation technology
    Tu, Chun-Hao
    Chang, Ting-Chang
    Liu, Po-Tsun
    Yang, Che-Yu
    Feng, Li-Wei
    Wu, Yung-Chun
    Sze, Simon M.
    Chang, Chun-Yen
    THIN SOLID FILMS, 2008, 516 (10) : 3128 - 3132
12345