PREPARATION OF POLYMER-FILMS FROM HEXAMETHYLCYCLOTRISILAZANE IN HIGH-FREQUENCY DISCHARGE PLASMA

被引：0
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作者：
SMIRNOVA, TP
KHRAMOVA, LV
BELYI, VI
SOLOVEV, AP
TARANOVA, IV
机构：
来源：
VYSOKOMOLEKULYARNYE SOEDINENIYA SERIYA A | 1988年 / 30卷 / 01期
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中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
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页码：164 / 169
页数：6
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