PREPARATION OF POLYMER-FILMS FROM HEXAMETHYLCYCLOTRISILAZANE IN HIGH-FREQUENCY DISCHARGE PLASMA

被引：0

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作者：

SMIRNOVA, TP

KHRAMOVA, LV

BELYI, VI

SOLOVEV, AP

TARANOVA, IV

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来源：

VYSOKOMOLEKULYARNYE SOEDINENIYA SERIYA A | 1988年 / 30卷 / 01期

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中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

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页码：164 / 169

页数：6

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